Current Pressures

High Purity Nitrogen

Low Purity Nitrogen

Compressed Air

MRC Safety Tree
Light Color Status Action
Green Normal Conditions Lab Open
Flashing Green Equipment issue Lab Open
Yellow Low Air Flow or Gas Detection Evacuate Cleanroom
Red Fire Alarm or Gas Detection Evacuate Building
MRC Temperature and Humidity

NNF GCA Stepper

Temperature68.1F
Humidity46.1%
Dewpoint46.5F

NNF Contact Litho

Temperature68.1F
Humidity46.4%
Dewpoint46.7F